Scanning electron microscopy (SEM)

Researchers using Jeol 7100 FEGSEM

LMCC has five FEGSEM instruments spanning a variety of capabilities and specifications. These are very much the workhorse instruments within the centre and capacity has been increased to meet user demands.

Scanning Electron Microscopy (SEM) is a microscopy technique in which a beam of electrons are directed at a specimen of interest. The electron beam interacts with the specimen, generating a number of secondary emissions. An SEM provides the ability for high resolution with a long depth of field images to be acquired. All of our FEGSEMs have auxiliary Energy Dispersive Spectroscopy (EDS) detectors and Electron BackScatter Diffraction (EBSD) cameras.

A FEGSEM is an indispensable analytical tool for research and solving industrial problems where optical microscopes will not provide the required resolution. LMCC has recently invested in two new FEGSEMs to increase the capacity within the centre; this is inaddition to the combined PFIB and FIB/FEGSEM (Dualbeam) systems which are also located within the centre.

Typical industrial uses

  • Surface structure
  • Paint defects
  • Corrosion products
  • Powder analysis
  • Particle size analysis
  • Thickness measurements of depositied layers
  • Failure analysis

Key Capabilities

  • Topographical Imaging - Secondary Electron Imaging
  • Secondary phases/precipitatee Imaging - Backscattered Imaging (BSE)
  • Chemical Mapping - Energy Dispersive Spectroscopy (EDS)
  • Crystallographic orientation - Electron Backscattered Diffraction (EBSD)

LMCC currently has five FEGSEM instruments, details of which can be obtained below:

Loading samples into jeol 7800 FEGSEM

Built-in detectors:

  • Lower Electron Detector (LED)
  • Upper Electron Detector (UED)
  • Upper Secondary Detector (USD)
  • Large Depth Focus (LDF)
  • Retractable Electron Backscatter Detector (RBEI)

Analytical detectors:

  • Energy Dispersive Spectroscopy (EDS) - Oxford Instruments X-Max 80
  • Electron Backscatter Diffraction (EBSD) - Oxford Instruments Nordlys CCD detector

Built-in detectors:

  • Lower Electron Detector (LED)
  • Large Depth Focus (LFD)
  • Retractable Electron Backscatter Detector (RBEI)

Analytical detectors:

  • Energy Dispersive Spectroscopy (EDS) - Oxford Instruments X-Max 80
  • Electron Backscatter Diffraction (EBSD) - Oxford Instruments Nordlys CCD detector

Built-in detectors:

  • Everhart Thornley Detector (ETD)
  • In-lens annular Detector
  • Retractable Backscatter Detector (RBEI)

Analytical detectors:

  • Energy Dispersive Spectroscopy (EDS) - Oxford Instruments X-Max 80

Variable Pressure Capability

Built-in detectors:

  • Everhart Thornley Detector (ETD)
  • Electron Backscatter Detector (BSD)

Environmental detectors:

  • Large Field Detector (LFD)
  • Gaseous Secondary Electron Detector (GSED)
  • Gaseous Backscatter Detector (GBSD)

Variable Pressure Capability

 

Built-in detectors:

  • Electron Backscatter Detector (BSD)

Analytical detectors:

  • Energy Dispersive Spectroscopy (EDS) - Oxford Instruments Swift ED3000

 

Case Studies

In-situ thermal aging of lead-free solder

In-situ thermal aging of lead-free solder

The intermetallic compound (IMC) layer produced by Self-propagating exothermic reactions bonding is very thin, however, using P-FIB and hot stage heating the layer growth can be observed and quantified in real time. This technique offers an unprecedented opportunity to observe IMC growth.
EDS maps showing that the particles present are chemically different

SEM detector for particle analysis

In this study, detectors available in SEM and FIB were compared for the analysis of particles in steels.

Are you interested in using this technique?

If you are interested in using this technique and would like further information please do not hesitate to get in touch.

Loughborough Researchers Industrial Users / External Researchers