Auger Electron Spectroscopy (AES)
Auger Electron Spectroscopy (AES) is used to determine surface elemental compositions with both good lateral and depth resolution. All elements can be detected in the range Li to U with detection limits from 0.1 atomic% and above depending upon the element of interest.
The excellent lateral resolution permits imaging to the nanometre scale. A sequential combination of AES analysis and inert ion bombardment permits depth profiling to be carried out with nanometre depth resolution. AES is typically used for the analysis of metals and semiconductors but can also be used to interrogate flat glasses and ceramics.
Typical applications include:
- Characterisation of defects, particles or other features requiring good lateral or depth resolution
- Depth profiling to determine oxide or overlayer thicknesses and compositions
- Analysis of multilayers and buried interfaces
- Analysis of fracture surfaces