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Fullerene Chemically Amplified Resists for Next Generation Lithography

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AUTHOR(S)
TITLE
JOURNAL/CONFERENCE
YEAR
VOL.
PAGE
A.P.G. Robinson; F.P. Gibbons, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson Direct Electron-Beam Writing of Highly Conductive Wires in Functionalized Fullerene Films Small 2009 5 2750
A.P.G. Robinson; J. Manyam, F.P. Gibbons, S. Diegoli, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson Chemically amplified fullerene resists for e-beam lithography P. Soc. Photo-Opt. Inst. 2008 6923 69230M
A.P.G. Robinson; J. Manyam, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson Low Activation Energy Fullerene Molecular Resist P. Soc. Photo-Opt. Inst. 2009 7273 72733D
A.P.G. Robinson; X. Chen, R.E. Palmer, A.P.G. Robinson A high resolution water soluble fullerene molecular resist for electron beam lithography Nanotechnology 2008 19 275308
A.P.G. Robinson; J. Manyam, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson Characterization of the Effects of Base Additives on a Fullerene Chemically Amplified Resist P. Soc. Photo-Opt. Inst. 2010 7639 76391N
   

 

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